Abstract
Diamond-like carbon (DLC) films with different thickness were deposited by filtered cathode vacuum arc (FCVA). Vis-Raman and spectroscopic ellipsometry were employed to analyze the structure of DLC films. The wavelength of Vis-Raman is 514.5 nm. Experimental results show that structures of DLC films are affected by film thicknesses. When the film thickness increases from 2 to 30 nm, the G-peak position (G-pos) shifts to higher wavelength, the intensity ratio ID/IG and the extinction coefficient Ks decrease. It is indicated that the content of sp3 bond increases with film thickness. However, when the film thickness increases from 30 nm to 50 nm, ID/IG and Ks increase. The content of sp3 bonds decreases with film thickness.
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