Abstract
The paper describes surface acoustic wave (SAW) propagation on a ZnO/SiO2/high-velocity-alumina-substrate multi-layered structure. It was shown that, quite independent of the elastic properties of the alumina substrate, the electromechanical coupling factor k2 and temperature coefficient of frequency (TCF) reflect those for Lamb waves in a ZnO/SiO2 composite membrane. This suggests a simple guiding principle to find multi-layered structures with moderate temperature stability and k2 for SAW, that is, TCF could be compensated without greatly reducing k2 by the proper choice of substrate materials.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
