Effects of SAW Propagation with Electrochemical Deposition of Ge Film on LiNbO3 Substrate

Abstract

We present the results of a basic study on surface acoustic wave (SAW) propagation characteristics with electrochemical deposition of Ge thin films for functional devices. We investigated forming Ge film on the SAW propagation path by using electrochemical deposition as a new process approach. Energy-dispersive X-ray spectroscopy (EDX) analysis of deposited particles indicated that the electrochemical deposition of Ge was successfully achieved by applying pulse-potential to the working electrode. The experimental results of the fabricated device show that the SAW propagation characteristics of LiNbO3 with Ge has a frequency shift toward a higher range due to the change in the mass-loading of SAW propagation after Ge deposition. These experimental results indicate the potential use for functional devices.