Profile of implanted in potassium titanyl phosphate by the , C nuclear reaction

Abstract

40 keV, 50 keV and 60 keV were implanted at and into potassium titanyl phosphate ( or KTP). The depth of distribution of in was measured by the H(C nuclear reaction. The depth distributions obtained are compared with TRIM (transport of ions in matter) predictions. The results show that the TRIM simulation has described the shape of the front side of the experimental profile well, but there is significant deviation for the deep side of the profile between TRIM prediction and experimental data.