Abstract
Mercury ions were implanted in amorphized potassium titanyl phosphate (KTiOPO4) in the range of 50–400 keV. The implanted depth distribution was measured by Rutherford backscattering of 2.1 MeV He ions. The mean projected ranges and range stragglings obtained are compared with our calculation based on Biersack’s angular diffusion model and Monte Carlo simulation. The results show that the experimental mean projected range is in good agreement with the calculated value within the experimental errors but the range straggling is systematically higher than the calculated value. However, significant deviations from the transport of ions in matter (TRIM’89) prediction for mean projected range and range straggling are found.
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