Abstract
Potassium titanyl phosphate (KTiOPO4 or KTP) was implanted with1.0 MeV Au+ ions to a fluence of 5×1015 ions cm-2 at roomtemperature under different angles of incidence. The longitudinal and lateralrange profiles, diffusion, damage, surface morphology and structure have beenstudied by Rutherford backscattering (RBS)/channelling, scanning electronmicroscopy (SEM) and x-ray diffraction. The results show that (1) theexperimental mean projected range is larger than the value predicted by TRIM(transport of ions in matter) by about 15%; (2) the experimental rangestraggling and lateral spread deviate from the TRIM predictions by around 50and 20%, respectively; (3) the crystal is completely amorphized in thedamaged region; (4) the implanted gold in KTiOPO4 is stable againstannealing at 700 °C, but diffusion takes place at and above800 °C; (5) the surface morphology is different for virgin and Au+implanted KTiOPO4.
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