Abstract
Ba 0.4 Sr 0.6 TiO 3 (BST) films were deposited on quartz substrates by radio frequency (RF) magnetron sputtering in O 2 /Ar atmosphere. The structural property of the film was studied by XRD, the morphology by AFM and the cross-section by SEM. As-grown films were amorphous and presented compacted grain morphology, its surface fluctuation was about 3 nm. When sputtering time was higher than or equal to 3 h, the annealing temperature above 550°C, the crystalline film has been identified as a cubic perovskite structure. When sputtering time was 5 h, the thickness of film was about 1 μm. Different thickness films could be obtained by controlling the sputtering time.
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