Abstract
A hybrid sol-gel-powder method for the low-cost processing of thick PZT films is presented. Thick films with a thickness in the range from 2.5 to 10 μm can be processed using few processing steps. The films are spin-coated on a platinized Si substrate and annealed at temperatures up to 800°C. Microstructure is characterized by means of scanning electron microscopy and X-ray diffraction. The dielectric properties are characterized using an impedance analyser. The ferroelectric properties are also reported. It is shown that high quality thick films with superior ferroelectric and dielectric properties can be obtained.
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