Abstract
This study investigated the preparation of an Y-doped BaZrO3 (BZY) thin film electrolyte by a laser chemical vapor deposition (LCVD). The structure, chemical composition, and other properties of the deposited BZY film were analyzed in detail by X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. These analyses revealed that a uniform BZY thin film consisting of columnar structures was successfully deposited by the LCVD method. In addition, the thickness of the BZY film was about 16 μm, even though the deposition time was only 10 min, indicating that high-speed deposition of the BZY film was achieved by the LCVD method.
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