Abstract
We have succeeded in in situ growth of YBa 2Cu 3O x (YBCO) superconducting films by developing a new metalorganic molecular beam epitaxy (MOMBE) technique with in situ monitoring of reflection high energy electron diffraction (RHEED) intensity. The X-ray diffraction pattern showed peaks corresponding to those calculated using a Laue function. This indicates the high quality of films grown using MOMBE. Atomic force microscope and RHEED oscillations show two-dimensional, unit cell by unit cell growth.
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