Abstract
(Pb,Ba)TiO 3 and BaTiO 3 films showing crystalline perovskite structure have been prepared by the hydrothermal treatment at temperatures below 210°C. TiO 2 gel films were deposited on Pt/Ti/SiO 2 /Si substrate by sol-gel method and transformed into crystalline (Pb,Ba)TiO 3 and BaTiO 3 thin films by hydrothermal treatment in Ba(OH) 2 –Pb(OH) 2 and Ba(OH) 2 alkaline aqueous solutions, respectively. P-E hysteresis of (Pb,Ba)TiO 3 thin film shows good shape and remanent polarization is about 21.5 μ C/cm 2 . Good fatigue endurance up to 10 9 cycles is obtained. Piezo-electric butterfly curve measured in small area is very good.
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