Abstract
We have recently studied the preparation and the characteristic of the YBCO thin films by metalorganic chemical vapor deposition (MOCVD) using liquid state sources. In this study, we describe the control orientation of the films. The films were prepared on SrTiO 3 (100) single crystalline substrate using liquid state sources in order to discuss such issues as the a-axis growth mechanism. At the temperature between 650 and 700°C the films deposited on SrTiO 3 were strongly a-axis oriented even without photo-assistance. The TEM image of the film deposited at 700°C showed that the structure is c-axis oriented grains in the region less than about 200Åfrom the substrate, whereas the main structure is a-axis oriented grains. Thus liquid sources enable us to control the crystalline orientation in MOCVD, that has never been attained.
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