Abstract
The superconducting YBa2Cu307-y thin films were prepared on single-crystalline substrates by metalorganic chemical vapor deposition (MOCVD) with liquid sources. The stability of liquid sources and reproducibility of deposition enable us to observe details of the crystal of the growth in CVD. We investigated surface morphology of the samples by atomic force microscopy (AFM), and found the abrupt change in the terrace width at the deposition temperature of around 750°C. It suggests the appearance of a liquid phase on the growing surface by CVD growth and the change of the growth mode at this temperature. Key words: YBa2CO7-y thin film, MOCVD, surface morphology, liquid source
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