Abstract
A novel equipment of preparation of films by low temperature plasma assisted chemical vapor deposition (CVD) technique is built which allowed controlling the technological process in real-time mode. Diamond-like carbon (DLC) films were synthesized which exposed 99% transparency in wide range of spectrum, λ = 250 – 1100 nm. Also, technical modes using Ta2O5 stimulator were found allowing to obtain low resistivity of DLC as low as 310 – 4 Ohm cm at the optical transparency remaining as high as 85%. The features of the surface of films were studied by atomic force microscopy (AFM) and the layer adjacent to the surface by scanning electron microscopy (SEM). It is shown that stimulating centers on the substrate surface form nanotubes arranged parallel to the surface due to which electrical conductivity of the DLC film grows higher.
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