Abstract
Abstract Pb(Zr x , Ti1-x )O3 (PZT) films were prepared on Ni metal plates by the sol-gel process using rapid thermal annealing (RTA). The PZT films were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and electron probe micro analysis (EPMA). The electrical properties such as dielectric constant, remanent polarization, coercive field and leakage current were measured for PZT film with Zr/Ti ratio (70/30, 50/50) on Ni metal substrates. As the PZT films are treated in PbO atmosphere at 750°C for 1 h, the dielectric constant and remanent polarization increased. This result can be explained by the fact that the increase in ferroelectricity of the PZT film is caused by the electric polarizability of lead ion.
Published Version
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