Abstract
The anodic aluminum oxide (AAO) films were prepared by anodization method from the 15 vol. % sulphuric acid solution, and prepared AAO films were heat-treated in the ranges of 25~1000°C. AAO films were characterized by EDAX, SEM and XRD techniques, respectively. The crystal phases of prepared AAO film is amorphous. The apertures of AAO film are in 25~30 nm. AAO films are amorphous when heat treatment temperatures of AAO films are below 800 °C. After the AAO film being heat-treated in the ranges of 850°C~900 °C, the heat-treated AAO film are γ-Al2O3film. When the AAO film is heat-treated at 950 °C, the part of γ-Al2O3change into α-Al2O3, and the heat-treated AAO film are mixed film of γ-Al2O3and α-Al2O3. After the AAO film being heat-treated at 1000 °C, the heat-treated AAO film is α-Al2O3film.
Published Version
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