Abstract
Lead zirconate titanate (PZT) thin films had been preparaed by rf magnetron sputtering. The perovskite PZT thin films were obtained by annealing at 500°C for 1 hour. Based on the indentification of the diffraction peak (d=2.50), the possible PZT solid solution fomation mechanism was discussed. The developed ferroelectric tester can sample, transfer, save and output the results about the properties of thin films. Ferroelectric hysteresis loops showed a remanent polarization of 24.8μmlC/ cm2 and a coercive field of 45kV/cm. Fatigue measurements showed that the PZT thin films were stable up to 4 × 108 cycles. The interface heterojunction effects of ferroelectric thin films on Pt electrode on the hysteresis loops and fatigue characteristics were discussed
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