Abstract
Penetration conditions of electromagnetic and electrostatic waves propagating in electron cyclotron resonance (ECR) ion source (ECRIS) plasma in Osaka Univ. have been examined in detail, and its relationship with the production of multicharged ions have been investigated experimentally. It has been clarified that there exists efficient configurations of ECR zones for producing multicharged ion beams, and it has been suggested that new resonances, i.e. upper hybrid resonances, must have occurred. We have been conducting new advanced experiments inducing actively these additional effects to enhance multicharged ion beams by launching extra-ordinary (x) mode waves. We have been trying to apply 4-6GHz x-mode microwaves to the 2.45GHz ECRIS, and in this paper we will describe the preliminary experimental results.
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