Abstract
Constant volume flow meter systems were developed for measuring pumping speeds of dry vacuum pumps. Their capability to measure throughput in the low vacuum region was exploited to calibrate 0.03, 0.2, and 1.6 mm throat diameter sonic nozzles. It was demonstrated that the calibrated sonic nozzles enabled the precise measurement of the pumping speed of a dry vacuum pump under test as the constant volume flow meter systems. To examine the measurement capability of both approaches considered in this study, the expanded measurement uncertainty, as well as the detailed measurement uncertainty budget, is presented. The proposed pumping speed measurement method has potential application for a new “in situ and portable” pumping speed tester or analyzer for the Korean semiconductor and flat display process industry.
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