Abstract
This paper presents a design and low-cost techniques for polymer-based chips for surface plasmon resonance (SPR) sensors. To obtain a polymer chip with a prism, microchannels and a chamber at microscale dimensions, replication techniques in polymers with controlled refractive index have been developed. Photoresist, polydimethylsiloxane (PDMS), polymethylmethacrylate (PMMA) and epoxy resin were used. Silicon dioxide/silicon-based molds have been obtained by anisotropic etching of silicon, and glass prisms were used as masters for replication. The photoresist molds were obtained by optical lithography and were used to obtain the microchannels and the chamber. A liquid prepolymer (PDMS, Sylgard 184) with curing agent at a ratio of 10:1 was used, and a special technique was developed in order to fabricate the components of the structure at the same time. For the deposition and direct patterning of the metallic layers onto the polymer surface, different methods were experimented with, including sputtering. The materials and techniques used to achieve SPR sensors are presented, and the possibilities and limitations of the technology are discussed.
Published Version
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