Abstract
Due to the inevitable, nonuniform relative speed distribution between a workpiece and polishing pads, double-sided polishing (DSP) faces the challenge of nonuniform removal distributions. Hence, maintaining workpiece flatness while perfecting surface finishing remains a challenge in the DSP process. This study controlled the pressure distribution on a workpiece using a polishing pad design to compensate for the nonuniformity. An analytical model of the removal distribution was proposed considering the impact of pressure distribution. Experiments confirmed the proposed model's capability to evaluate the compensating effect of the polishing pad design. Finally, design guidelines for uniform removal distributions were established.
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