Abstract
In this work, titanium nitride, titanium boro-nitride and titanium di boride coatings were deposited on H13 steel using plasma-enhanced chemical vapor deposition from BBr3, TiCl4, N2, H2 and Ar reactants at 500 °C. The results showed that the TiBN coating has a crystalline microstructure composed of both TiN and TiB2 phases. The calculated crystalline size of the TiN, TiBN and TiB2 coatings was about 13, 10 and 32 nm, respectively. The thickness of TiN, TiBN and TiB2 coatings was about 2.5, 0.3 and 0.5 µm, respectively. The hardness of TiN, TiBN and TiB2 films was 15.74, 19.44 and 23.47 GPa, respectively. The highest wear resistance was achieved for the TiB2 coating thanks to its high hardness and good adhesion strength.
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