Abstract

Amorphous Si film was prepared by plasma enhanced chemical vapor deposition (PECVD) of SiH4 on WE43 alloy for biomedical application. The microstructure and the composition of the film were investigated by glancing angle X-ray diffraction (GAXRD), X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES), respectively. The immersion test indicated that Si film could efficiently slow down the degradation rate of WE43 alloy in simulated body fluid (SBF) at 37±1°C. MTT assay suggested that the extract of the Si coated WE43 alloys was harmless to murine fibroblast cells (L 929). Hemolysis test and blood platelets adhesion test were conducted, and the results show that the hemolysis of WE43 alloy decreased after being coated by Si and the platelets attached on the Si film were at the inactivated stage with a round shape.

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