Abstract
Experimental results of comparative study of carbon dioxide conversion efficiency to CO and O2 in the plasmas of different low-pressure discharges are presented. Inductively coupled plasma source, magnetron discharge and anode layer discharge in Hall-type ion source were used in CO2 pressure range 0.5…3 mTorr. It is shown that the best combination of high conversion rate with significant energy efficiency of the conversion is demonstrated by the ICP source.
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