Abstract
We report our experimental investigations of the effect on the ion composition, including the ion mass-to-charge composition, of electron injection into the plasma of a high-current pulsed magnetron discharge in the ultra-low operating pressure range. We show that changing the magnetron discharge voltage by injecting additional electrons with adjustable current allows implementation of two operating modes: one with a plasma in which metal ions dominate (including multiply charged ions for certain target materials with low sputtering yield), and the other a magnetron non-sputtering mode with plasma of only gaseous ions.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
