Phase-measuring algorithm to suppress inner reflection of transparent parallel plate in wavelength tuning Fizeau interferometer

Abstract

Optical thickness variation is a fundamental characteristic of transparent optical devices. When measuring this variation by using a wavelength-tuning Fizeau interferometer, the measurement accuracy depends on the phase-shifting algorithm being used. Therefore, the phase-shifting algorithm should compensate for any errors incurred during the measurement, including the phase-shift error, coupling errors, and bias modulation of intensity. Among these errors, however, the coupling errors between the higher harmonics resulting from the inner reflections of the transparent plate and phase-shift error have not previously been considered. This paper presents a derivation of a 19-sample phase-shifting algorithm that can compensate for the miscalibration and 1st-order nonlinearity of the phase shift, coupling errors, and bias modulation of intensity during wavelength tuning. The characteristics of the 19-sample algorithm were estimated with respect to the Fourier representation in the frequency domain. The phase error of measurements performed using the 19-sample algorithm was discussed and compared with that of measurements obtained using other conventional phase-shifting algorithms. Finally, the optical thickness variation of a fused silica parallel plate was obtained using a wavelength-tuning Fizeau interferometer and the 19-sample algorithm. The measurement accuracy was discussed by comparing the ripples in the crosstalk noise with those calculated using other phase-shifting algorithms. The experimental results indicated that the optical thickness variation measurement accuracy for the fused silica plate was approximately 2nm.