Abstract

RHEED oscillations of the specular beam intensity have been analyzed during growth of GaAs and Al xGa 1−xAs on (001) GaAs. We found that it is possible to sustain RHEED oscillations indefinitely by a periodic phase locked perturbation of the growth front. This perturbation is provided by short interruptions of the impinging As 4 flux. A simple model is proposed to explain these results and the damping mechanism of RHEED oscillations.

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