Abstract
Epitaxial Pt electrodes were used to control the orientation of 100–140-nm-thick SrTiO3 thin films deposited by radio-frequency magnetron sputtering. The influence of SrTiO3 thin-film microstructures on stress, dielectric properties, and phase transformations was studied. Epitaxial (111)-oriented SrTiO3 films were under compressive stress after growth, while predominantly (110)-oriented SrTiO3 films deposited under identical conditions changed from tensile to compressive stress with increasing film thickness. Measurements of the permittivity as a function of temperature showed that (111) films underwent a phase transformation at ∼150K, whereas predominantly (110)-oriented SrTiO3 films showed no deviation from linear Curie-Weiss behavior in the measured temperature range (100–300 K). Thermodynamic models that assumed a uniform compressive strain in the films did not predict a ferroelectric phase transformation for the (111)-oriented film in the measured temperature range. Possible explanations for the differences between the predictions of thermodynamic theory and the experiments are discussed.
Published Version
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