Phase Transition and Optical Properties of VO2 and Al: ZnO/VO2 Thin Films

Abstract

Thermochromic Vanadium dioxide (VO2) has strong potential for smart window applications but its commercial scale usage is limited due to low visible light transmission. To address this issue, aluminum doped zinc oxide (AZO) anti-reflecting layer is integrated with VO2 layer in the present work. VO2 single layer and AZO/VO2 bilayer thin film samples were deposited by sputtering technique on quartz substrate. The single-phase growth of VO2 and AZO in single layer and bilayer thin film samples is confirmed by X-ray diffraction measurements. Monoclinic M1 phase of VO2 is detected in VO2 and AZO/VO2 thin film samples at room temperature. Monoclinic to rutile structural phase transition (SPT) in these samples is studied by performing temperature-dependent X-ray diffraction measurements. SPT in VO2 thin film samples is close to 68 °C and SPT temperature appears slightly lower in AZO/VO2 sample as compared to VO2 sample. Spectral transmittance measurement at room temperature showed significant improvement in the visible transmittance of AZO bilayer film than that of single layer VO2 thin film. These results demonstrate the possibility of integration of anti-reflecting layers such as AZO with VO2 layer for better visible transmittances suitable for large-scale smart window applications.