Abstract
A coplanar waveguide was fabricated by depositing a 1-µm-thick Au film on a multilayer dielectric, consisting of a 2-µm-thick lead zirconate titanate (PZT) film over an Al2O3 substrate, through etching. Following this, the reflection constant, transmission constant, and phase variation were measured for this transmission line as bias voltage was varied from 30 to 50 V. As a result, it was confirmed that the phase variation becomes about 15° at a 50 V bias at a frequency of 10 GHz. We then confirmed the basic input-output characteristics of this type of structure in the microwave band. Finally, the relative permittivity of a PZT thick film as a coplanar waveguide was estimated using the measurement results of relative permittivity according to the split cavity resonator method, and phase variation under the condition in which a bias voltage was applied.
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