Abstract

A one-dimensional model describing the diffusion of intrinsic defects in lead zirconate titanate (LZT) films of nonstoichiometric composition during their high-temperature treatment is proposed. The model includes the diffusion of vacancies by lead and oxygen, the formation and decay of their associates, interaction with extensive defects (dislocations in LZT films and the near-surface layer), interstitial inclusions, and LZT film contact with air leading to lead oxide evaporation from LZT film and its saturation by oxygen. The dependences of LZT film composition on the temperature and time of treatment are calculated. The possibility the concentration’s oversaturation by lead in a near-surface layer of LZT film, which can lead to the release of lead oxide, is shown.

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