Abstract
By using vacuum electron beam vapor deposition (EBVD) technology, perovskite-type SrTiO3 was deposited on indium tin oxide (ITO) conductive glass. The SrTiO3 orientation and its film thickness were well-controlled by appropriately modifying the growth conditions and deposition time. The elemental composition, microstructure, surface morphology and field emission character of SrTiO3 film were characterized by energy dispersive spectrum (EDS), X-ray diffraction (XRD) spectrum, field emission scanning electron microscope (FE-SEM) and field emission (FE) detecting system. The FE test results showed that the SrTiO3 film showed good field emission characteristics. The maximum field emission current density reach 88.96 μA/cm2 at 10.45V/μm applied electric field. And the experimental results show that the SrTiO3 film has certain potential in FE field.
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