Abstract
We fabricated an AC-coupled single-sided silicon strip sensor and an DC-coupled double-sided silicon strip sensor on a 5-in. 380-μm-thick wafer. The single-sided strip sensor has a size of 3.2 cm × 3.2 cm and 64 implanted and readout strips with a strip pitch of 500 μm. On the other hand, the double-sided strip sensor has an active size of 5.6 cm × 3.0 cm and 512 readout strips with a strip pitch of 50 μm. Two low-noise analog ASIC VA1 and VA1TA chips were used for signal readout of the single-sided strip and the double-sided strip sensors, respectively. The data acquisition system was based on a 12-bit 64-MHz Flash analog-to-digital converter (FADC) and control software for the PC-Linux platform. The signal-to-noise ratios of the sensor were measured with radioactive sources and a 45-MeV proton beam of the MC-50 cyclotron at Korea Institute of Radiological and Medical Sciences (KIRAMS). The performance results of the manufactured AC-coupled single-sided silicon strip detector and DC-coupled double-sided silicon strip detector are presented.
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