Abstract
Performance of the ionization gauge with a large-angle ion deflector (254.6°) has been examined in extreme high vacuum. We have estimated 4×10−13 Pa to be the lowest measurable limit of the gauge due to soft x-ray noise (1-min period of measurement) and to be less than 2×10−13 Pa for electron stimulated desorption ion noise. The sensitivity of the gauge was 0.018 Pa−1 for hydrogen. By use of a channeltron multiplier for ion detection, the sensitivity of the gauge is improved: hence, a pressure of ∼3×10−11 Pa is easily measured at an emission current <0.1 mA. Deviation from the linear relation of ion current versus emission, allows outgassing from the gauge to be detected.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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