Abstract
One problem associated with pressure measurement in the extreme high vacuum (XHV) region when using an ionization gauge is the influence of the ions of electron stimulated desorption (ESD) which impedes the accurate measurement of pressure. Gas phase ions can be separated from ESD ions by utilizing the difference in the kinetic energy of the two types of ion. We made a simple cylindrical energy analyzer and installed it in between the ion source and the quadrupoles of a residual gas analyzer (RGA). The energy analyzer allowed us to decouple the gas phase ions from the ESD ions at a transmission of about 3%. The trajectories and transmission of the ions were simulated by computer. The experimental results agreed with the results of the computer simulations.
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