Abstract
The claw vacuum pump is extensively utilized in semiconductor, photovoltaic and aerospace industries because of its dry oil-free and compact structure. In order to reduce the power consumption of the claw vacuum pump caused by its special mixing process during operation, a novel pair of claw rotors was proposed. This innovation involves replacing the conventional circular arc at the dedendum of the claw rotors with an eccentric circular arc. A geometric model of the novel claw rotor was established, and the geometric characteristics of both the novel and conventional claw rotors were compared. Subsequently, the optimal design parameters were determined. The pressure distribution and power consumption of two claw vacuum pumps were analyzed with numerical simulations. Study results indicates that the power consumption of the proposed claw vacuum pump in the mixing process is reduced by 72.3 %, and the total power consumption is reduced by 12.6 % compared to the conventional pump. The study is of great significance for reducing power consumption of the claw vacuum pumps and improving application.
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