Abstract
The design and simulation of the cantilever beam for tunable fabry perot filter is discussed in this paper. The fabry perot filter is tuned to operate in three frequency ranges namely short wave Infrared (SWIR), mid wave Infrared (MWIR) and long wave Infrared (LWIR) are operated in the frequency range of 1.6–2.5 μm, 3–5 μm and 8–12 μm respectively. The light that is emitted from the array of vertical cavity surface emitting laser (VCSEL) is tuned to the desired wavelength using this fabry perot filter. The fabry perot cavity length is varied using the MEMS cantilever. By applying the reflective coating to the arms of the cantilever, the fabry perot cavity is formed. The actuation given to the MEMS cantilever is electrostatic actuation. The potential difference between the two arms of the cantilever creates the electrostatic force, which attracts the free end of the cantilever. Due to the impact of the electrostatic force the arms get pulled in, as a result the separation between the mirrors varies, which in turn filters the desired wavelength. The array of cantilever is also simulated to get a desired pattern of the wavelength. The fabrication process flow for the simulated cantilever is explained. The fixed-free beam approach leads to the analysis of capacitance, stress, strain and displacement.
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