Abstract
In this research has been developed multifasa diffraction pattern analysis technique with rietveld refinement method with case study of application of the technique on thin layer of PZT (PbZrxTi (1-x) O3) which has been synthesized with variation of 1, 2, and 3 hour annealing time. This interpretation technique begins with the determination of the background, then performed refinement parameter determinant of pattern change, peak shape, and intensity of diffraction. The parameters are, respectively, scaling factor, 2θzero, lattice parameter, gaussian peak shape constant, and gaussian-lorentzian, atomic position coordinates, and preferred orientation. The refinement results show that changes in peak shape constant give significant changes in residual values, whereas atomic and preferred orientation changes do not provide significant change in residual values.
Highlights
In this research, we have developed an analytical techniques of multiphase diffraction pattern using rietveld refinement method, in case application studies of these techniques on PZT (PbZrxTi(1-x)O3) thin films which had been synthesized with variation of annealing time of 1, 2, and 3 hours
20, 467474. [11] Hunter, B.A., and Howard, C.J. (1998), A Computer Program for Rietveld Analysis of X-Ray and Neutron Powder Diffraction Patterns, Lucas heights research Laboratories, Australian Nuclear Science and Technology Organization, Australia. [12] Kern, A. (2008), Profile Analysis, in Principles and Applications of Powder Diffraction, Editor: Clearfield, A., Reibenspies, J.H., Bhuvanesh, N., John Wiley & Sons, Ltd., Oxford, 188
Summary
Pengembangan Teknik Analisis Pola Difraksi Multifasa dengan Metode Rietveld Refinement: Studi Kasus Lapis Tipis PZT. Dalam penelitian ini telah dikembangan teknik analisis pola difraksi multifasa dengan metode rietveld refinement dengan studi kasus penerapan teknik tersebut pada lapis tipis PZT (PbZrxTi(1-x)O3) yang telah disintesis dengan variasi waktu pemanasan anil 1, 2, dan 3 jam. Teknik interpretasi tersebut dimulai dengan penentuan background, kemudian dilakukan refinement parameter penentu perubahan pola, bentuk puncak, dan intensitas difraksi. Parameter tersebut berturut-turut antara lain faktor skala, 2θzero, parameter kisi, konstanta bentuk puncak gaussian, dan gaussian-lorentzian, koordinat posisi atom, dan preferred orientation. Hasil refinement tersebut menunjukkan bahwa perubahan konstanta bentuk puncak memberikan perubahan signifikan pada nilai residu, sedangkan perubahan posisi atom dan preferred orientation tidak memberikan perubahan signifikan pada nilai residu. Kata Kunci: rietveld refinement, pola difraksi sinar-X, difraktogram multifasa, lapis tipis PZT, nilai residu
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