Abstract
The thickness measurement of PS thin films on QCM surface and ZnPc layer on QCM/PS using Sauerbrey equation and Scanning Electron Microscope (SEM) has been investigated. Calculation result using a modified Sauerbrey equation show the thickness of PS layer and ZnPc one are 0,45 μm and 0,0676 μm respectively. Additionally the thickness measurement by using SEM shows the thickness of PS layer is 5,33 μm and the thickness of ZnPc layer is 10,44 μm. The differences thickness between Sauerbrey equation and SEM topograph is due to layers porosity. The topography of thin films produced by the secondary electron beam scanning allows to get a magnification of SEM image so that it can be measured directly. While the thickness calculation using the Sauerbrey equation is based on the change in the resonance frequency of QCM.
Highlights
Sauerbrey equation and Scanning Electron Microscope (SEM) has been investigated
a modified Sauerbrey equation show the thickness of PS layer
Additionally the thickness measurement by using SEM shows the thickness of PS layer is
Summary
Telah dilakukan pengukuran ketebalan lapisan tipis polistiren (PS) di atas permukaan QCM dan lapisan tipis ZnPc di atas permukaan QCM/PS menggunakan persamaan Sauerbrey dan Scanning. Hasil penghitungan menggunakan modifikasi persamaan sauerbrey menunjukkan ketebalan lapisan tipis PS di atas permukaan QCM sebesar 0,45 μm dan ketebalan lapisan tipis ZnPc di atas permukaan QCM/PS sebesar 0,0676 μm. Selain itu hasil pengukuran ketebalan menggunakan Scanning Electron Microscope (SEM) menunjukkan ketebalan lapisan tipis PS di atas permukaan QCM sebesar 5,33 μm dan ketebalan lapisan tipis ZnPc di atas permukaan QCM/PS sebesar. Perbedaan ketebalan antara hasil penghitungan dengan hasil SEM disebabkan karena porositas lapisan. Topografi lapisan tipis yang dihasilkan oleh scanning berkas elektron sekunder pada SEM memungkinkan untuk mendapatkan perbesaran gambar yang cukup sehingga dapat dilakukan pengukuran secara langsung. Kata kunci : Polistiren, ZnPc, QCM, Lapisan Tipis, Persamaan Sauerbrey, SEM, Porositas
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