Abstract
Partial dislocation (PD) combinations near the substrate/epilayer interface and the epilayer surface of 4H-SiC are analyzed for bar-shaped single Shockley-type stacking faults (1SSFs) by plan-view transmission electron microscopy (TEM) with the aid of photoluminescence imaging. Although the PDs are found to have a zigzag structure similar to that found in triangular 1SSF by TEM observation, the combination is thought to be different, consisting of a 30° Si-core + 90° Si-core for the triangular 1SSF and 30° Si-core + 30° C-core for the bar-shaped 1SSF. The features of the basal plane dislocation at the origin are speculated by also identifying the converted threading edge dislocation by additional Burgers vector determination of the PD loop by TEM.
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