Abstract
Forming a part of the CAD/CAE attempts to simulate and design microsystems, the process of parameter extraction for a pressure sensor macromodel from layout is presented. The pressure sensor was integrated on a silicon chip by means of a standard CMOS technology (1.0 urn from Atmel-European Silicon Structures) followed by micromechanical structuring of the device. A tool for analysing the physical layout of the sensor is also described. From the results, an electrical model of the sensor was obtained for use in conventional CAD tools.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
