Abstract

Desorption of Bi and Ag deposited on Si(100) surfaces has been studied by Auger electron spectroscopy for heat treatment in distilled ozone atmospheres. Bi was desorbed from the Si surface at a substrate temperature Ts of 350∼450°C and Ag was desorbed at Ts of 500∼570°C. The reflection high-energy electron diffraction (RHEED) patterns for Ag overlayers suggested that three-dimensional Ag(100) layers are formed on Si(100).

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