Abstract
In this study, we investigated the control of the orientation and ordering of self-assembled nanodots from a block copolymer (BCP) with the help of a guide pattern created by electron beam (EB) drawing. The guide pattern consisted of a post lattice and guide lines. The former is used to enable self-assembled nanodots from the BCP to be regularly arranged, while the latter is used to control the orientation of the nanodot arrays. It was demonstrated that the combined guide pattern was effective for controlling the BCP dot array to achieve long-range ordering and controlled orientation.
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