Long-range-ordering of self-assembled block copolymer nanodots using EB-drawn guide line and post mixing template

Abstract

We studied long-range ordering of self-assembled nanodot arrays for patterned media, using a guide post and line mixing template made of an electron beam (EB) resist to pack many nanodot arrays between guide lines. We designed the mixing pattern, EB-drew it on silicon substrate, brushed the surface of the pattern, and self-assembled block copolymer dot arrays using polystyrene–polydimethl siloxane (PS–PDMS) and mixing templates made of hydrogen silsesquioxane (HSQ) negative EB resist. The experimental results demonstrate the possibility of forming long-range ordering of 6 and 9 self-assembled nanodot arrays with a size of 20nm and a pitch of 33nm between the guide lines, using the mixing templates with three and fourfold post lattices, respectively.