Abstract
Sacrificial layer release is the key process step of cavity structure formation of Film Bulk Acoustic Resonator (FBAR), the degree of sacrificial layer release directly determines how good or bad the resonance characteristic of FBAR is. The Constant Diffusion Coefficient (CDC) model numerical iteration of sacrificial layers etching process was simulated with MATLAB, and the etching process was also simulated with Silvaco. According to the simulation results, put forward optimum design of release window. The resonance simulations of FBAR with/without release window have been done by FEA software. The simulation results show that the aperture cavity type FBAR, i.e. the cavity type FBAR with release holes, still has distinct resonant characteristic, but the frequency of impedance zero point and impedance pole of the novel type FBAR are all drifted to higher frequency, and the effective electromechanical coupling coefficient and the quality factor are all reduced.
Published Version
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