Abstract
Discharge characteristics at low pressures (<0.1 Pa) of an unbalanced magnetron with two electromagnets have been studied. The discharge extinction and ignition pressures are a function of the currents I1 and I2 in both electromagnet coils. Minimum pressure is obtained for a particular ratio I2/I1. Extinction pressures range down to 1.5×10−2 Pa. The magnetic field of the magnetron was measured. Its shape was fitted using Bessel functions and the field line pattern solved using Runge–Kutta method. The magnetic field for the minimum extinction and ignition pressures features maximum area of the target covered with the tunnel of magnetic field lines.
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More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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