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https://doi.org/10.1109/icsens.2010.5689978
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Cite Publication Date: Nov 1, 2010 |
 Citations: 2 |
Affiliation: Stanford University
Piezoresistive cantilevers are commonly used for force sensing. However, the design of piezoresistive cantilevers is complicated by coupling between many design parameters as well as design and operation constraints. Here, we discuss analytical models and optimization techniques for piezoresistive cantilevers.
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