Abstract
We present the design, fabrication and characterization of sub-micron piezoresistive silicon cantilevers for high frequency force detection. The cantilevers are fabricated by a simple three-mask process and doped using POCl 3 diffusion, which enables high doping levels and negligible lattice damage. Devices have a force resolution of 298 pN from 1 Hz – 50 kHz (f 0 =187 kHz) and 678 pN up to 100 kHz (f 0 =419 kHz), the highest combination of force resolution and measurement bandwidth to date.
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