Abstract

We investigated the defect states and optoelectrical properties of methylammonium lead iodide (MAPbI3) perovskite films synthesized via a two-step dry process. To synthesize MAPbI3 thin films, PbI2 thin films were deposited via rf magnetron sputtering and were subsequently exposed to methylammonium iodide (MAI) vapor to synthesize MAPbI3 thin films. By using deep level transient spectroscopy and space-charge-limited current methods, the defect density of the perovskite films was proven to be reduced by about 6 times as the reaction temperature increased from 90 to 110 °C. At a high reaction temperature of 130 °C, the deformation process could occur, resulting in a rising trap density within the perovskite film. Along with a significant decline in defect density, the photoresponsivity of films fabricated at 110 °C were higher by about 2.05 and 18.76 times more than those of samples prepared at 100 and 130 °C, respectively. An excellent detectivity of 1.17 × 1013 Jones was observed from the sample synthesized at 110 °C, demonstrating the superiority of a two-step dry process.

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