Abstract
High-quality transparent and heat-reflecting indium-tin-oxide films were prepared by reactive electron-beam evaporation. The complex dielectric function was evaluated from spectrophotometric measurements in the 0.25–50 μm range. The optical data are discussed from a theoretical model which encompasses the contributions from free carriers, valence electrons and phonons. It is found that ionized impurity scattering is the main damping mechanism of the free electrons.
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